梳状谐振式磁场传感器设计  

Design of Resonant Magnetic Field Sensor with Comb Finger

作　　者：李成章[1] 黄庆安[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《微纳电子技术》2007年第7期279-281,共3页Micronanoelectronic Technology

基　　金：国家自然科学基金重点资助项目(90607002)

摘　　要：给出了一种新型梳状微机械谐振式磁场传感器的设计。采用静电激励和静电检测,通过罗伦兹力的反馈将磁场的大小转变为频率输出。对结构模型进行简化,推导出了本征频率的计算公式并进行了ANSYS模拟。通过尺寸的设计,该传感器的灵敏度可以达到258kHz/T。A novel magnetic field sensor based on the comb structure was proposed. Transforming the output of frequency to the magnetic field through the feedback of Lorentz force, this device was capacitively excited and the signal was capacitively detected. After simplifying the model of design, the expression of the frequency was got and the structure was simulated by ANSYS. High sensitivitv of 258 kHz/T is achieved after optimizing parameters of the structure.

关 键 词：磁场传感器 谐振式 罗伦兹力 频率输出 

分 类 号：TP212.13[自动化与计算机技术—检测技术与自动化装置]