复合压力传感器研制  

Development of Recombination Pressure Sensor

作　　者：杨勇[1] 金琦[1] 李长春[1] 郭丽娟[1] 

机构地区：[1]沈阳仪表科学研究院,沈阳110043

出　　处：《微纳电子技术》2007年第7期291-293,共3页Micronanoelectronic Technology

摘　　要：为满足行业配套组件的发展需求,研制了一种新型复合压力传感器。该传感器采用分体结构设计,将压力信号转换成深度信号,利用精密的信号处理电路,将微弱的深度信号进行放大、比较等处理,可同时输出连续量电信号和阶跃量信号。该传感器具有精度、过载倍数和可靠性高,温度系数小,耐腐蚀等特点,整体性能均高于单一功能类的产品。A new kind of recombination pressure sensors was designed to meet the development requirement in the relative industries elements. The discerption structure design was adopted, and the pressure signal was transformed into the depth signal. The weak depth signal was magni- fied and compared with other signals with precise signal processing circuit. The constant electron- ic signal and the step leap signal were exported in the same time. The recombination pressure sensor has such features as high accuracy, overload capacity and reliability, small temperature co- efficient, anti-corrisive and so on, and its entire function is superior to that of the single function product.

关 键 词：传感器 耐腐蚀 开关信号 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]