有机/无机杂化SiO_2/Si光波导薄膜的制备及表征  

Fabrication and Characterization of Organic-inorganic Hybrid SiO_2/Si Optical Waveguide Thin Film Materials

作　　者：王玥[1] 吴远大[1] 李建光[1] 王红杰[1] 胡雄伟[1] 

机构地区：[1]中国科学院半导体研究所光电子研究发展中心,北京100083

出　　处：《半导体光电》2007年第4期525-527,共3页Semiconductor Optoelectronics

基　　金：国家自然科学基金资助项目(60507006;60477035)

摘　　要：采用有机/无机杂化溶胶-凝胶(sol-gel)法制备了SiO2光波导薄膜材料。采用甲基丙烯酰氧丙基三甲氧基硅烷(MAPTMS)作为反应先躯体,四丙氧基锆(ZPO)作为调节折射率的材料,正丙醇(n-propyl alcohol)为溶剂,利用旋涂方法在Si基片上成膜,采取低温长时间、高温短时间的热处理方式,制备出无龟裂薄膜。分别采用棱镜耦合仪和原子力显微镜(AFM)研究了不同溶剂量和不同ZPO量情况下,薄膜的折射率、厚度以及表面形貌变化情况。研究结果表明:通过调节正丙醇的用量,可以实现薄膜厚度可控;通过调节ZPO的用量,可以实现薄膜折射率可控;薄膜的表面平整度非常好,在5μm×5μm的扫描范围内,表面粗糙度小于0.430 nm,表面起伏度小于0.656 nm。SiO2 optical waveguide materials were synthesized by organic-inorganic hybrid sol-gel method,and were spun on silicon substrate. Crack-free films were gained by means of a special thermal treatment ,which could be summarized as low temperature for long time and high temperature for short time. The films were analyzed by prism coupler and atomic force microscopy. The experimental results show that the thickness and refractive index of the films can be adjusted by controlling the content of n-propyl alcohol and ZPO respectively. The surfaces of as-deposited films are very smooth, with roughness less than 0. 430 nm and undulation less than 0. 656nm in a 5 μm×5 μm scanning square.

关 键 词：溶胶-凝胶 杂化 SIO2 光波导 

分 类 号：TN25[电子电信—物理电子学]