冷却速度对Al-Si-Cu溅射靶材凝固组织的影响  

Eeffects of cooling rate on solidification structures of Al-Si-Cu sputtering targets

作　　者：王日初[1] 郭敏[1] 余琨[1] 文丹华[1] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083

出　　处：《粉末冶金材料科学与工程》2007年第4期244-248,共5页Materials Science and Engineering of Powder Metallurgy

基　　金：军品配套研制项目(JPPT-115-001)

摘　　要：采用宏观腐蚀、X射线衍射分析和扫描电镜观察,研究在不同冷却速度下凝固的Al-1%Si-0.5%Cu(质量分数,下同)合金的宏观和微观组织。实验结果表明,冷却速度对Al-Si-Cu合金的凝固组织有显著影响。随着冷却速度增大,Al-Si-Cu合金凝固组织的晶粒形状和尺寸以及第二相的大小、形貌和分布都发生明显的变化:炉冷试样晶粒为粗大树枝晶状,第二相呈带状富集在晶界处,宽度达15μm;铁模和铜模铸造试样具有典型铸锭组织,大部分第二相呈不到3μm宽的线状富集在晶界处,但铜模铸造试样的柱状晶区较窄,且晶粒较细小;水冷铜模铸造试样几乎完全为细小的等轴晶,晶粒尺寸小而均匀,第二相呈直径约3μm的细小点状弥散分布在α-Al基体中,可得到成分和结构都较均匀的靶材。The macrostructures and microstructures of Al-1%Si-0.5%Cu sputtering target under different cooling rate were observed and researched by macro-corrosion, X-ray diffracation and scanning electron microscopy. Results of experiments indicate that effects of the cooling rate on solidification structures of Al-Si-Cu alloy are significant. When cooling rate increases, the shape and size of solidification grains as well as the size, shape and distribution of the second-phase in the microstructures of Al-Si-Cu alloy change obviously. The structure of the specimen solidified in furnace are composed of coarse fir branch crystal and band-shaped second-phase which enrich on grain boundary with about 15 μm width. The structure of the specimen solidified in iron and copper mould are typical ingot structure. And most of second-phase enrich on grain boundary of line-shape with nearly 3μm width. But the columnar crystal zone and the grains of the specimen solidified in copper mould are narrower and smaller. Solidification in water cooled copper mould can gain targets of homogeneous component and structure which are composed of almost fine equiaxed grains and fine spot-shaped second-phase dispersal distributed in the α-Al with about 3μm diameter.

关 键 词：Al—Si—Cu溅射靶材 冷却速度 凝固组织 

分 类 号：TG290[金属学及工艺—铸造]