基于DMD的数字灰阶编码掩模的设计  

Research of the Digital Coding-mask Based on DMD

作　　者：白鹭[1] 高益庆[1] 

机构地区：[1]南昌航空大学

出　　处：《光电技术应用》2007年第4期35-37,共3页Electro-Optic Technology Application

摘　　要：引入了一种利用空间光调制器DMD设计编码掩模的新方法,将编码掩模与DMD结合起来,充分发挥DMD(Digital Micro mirror Device,简称DMD)的实时性、灵活性以及易于对准的优点.还可以实现对投影曝光过程中的非线性因素引起的预畸变进行预校正.A novel method is proposed to design coding-mask based on DMD. The coding-mask is combined with DMD which is real-time, flexible and easy for alignment. Pre-distortion due to the non-linear effect in the aerial image and resist course can be implemented.

关 键 词：编码掩模 DMD 非线性因素 预畸变 

分 类 号：TP391.44[自动化与计算机技术—计算机应用技术]