脉冲激光微细加工曝光区温度的不接触测量  

Remote Temperature Measurement of the Exposed Region in Pulse Laser Assisted Microprocessing

作　　者：王小林[1] 王昱林[1] 徐攀[1] 叶玉堂[1] 吴云峰[1] 刘霖[1] 范超[1] 焦世龙[1] 

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《光电子．激光》2007年第9期1096-1099,共4页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60277008);教育部重点科技资助项目(03147);四川省科技厅资助项目(04GG021-020-01);国家重点实验室基金资助项目(M1701050SJ500501);国防科技重点实验室基金资助项目(514910501005DZ-0201);电子科技大学光电信息学院URTP计划资助项目

摘　　要：针对大功率脉冲激光微细加工区域工作激光对辐射测温的影响,提出在周期脉冲激光的间隙内提取温度信号的新方法,应用采样保持原理,研制相应的测量系统,通过温度定标,从A/D采样值直接读取温度值。结果表明,该温度测量系统能有效地消除工作激光对温度测量的干扰,准确地测量曝光区域的温度,在温度为500℃左右时,系统的温度分辨能力可达0.03℃,能满足激光扩散、激光合金等工艺要求。In order to eliminate the serious influence of the working laser on the accuracy of the temperature measurement,a new method has been proposed, and the corresponding measuring system has been designed and fabricated. Based on the sampling and holding principle,the temperature information is picked up in the intervals between the laser pulses. Temperature calibration has been put into practice to get real temperaures from AD values directly. Experimental results show that the system can eliminate the serious influence of the working lair effectively,and measure the temperature of the small exposed region accurately in the pulse laser assisted microprocessing. A temperature resolution of 0.03 ℃ has been obtained when the temperature is around 500 ℃,which satisfies the requirements of the induced diffusion and alloying.

关 键 词：脉冲激光微细加工 红外辐射测量 不接触温度测量 采样保持 

分 类 号：TN247[电子电信—物理电子学]