无线通讯用硅基微小天线的设计与制作  

Design and Fabrication of Miniature Antenna Based on Silicon Substrate for Wireless Communications

作　　者：郭兴龙[1] 蔡描[1] 刘蕾[1] 游淑珍[1] 赖宗声[1] 

机构地区：[1]华东师范大学信息学院电子系,上海200062

出　　处：《固体电子学研究与进展》2007年第3期361-365,共5页Research & Progress of SSE

基　　金：上海应用材料研究与发展基金项目资助(批准号:06SA11);国家自然科学基金项目(60676047)

摘　　要：采用微电子工艺在高电阻率硅片上设计和制备了一种新颖紧凑共平面波导馈电天线,并对其进行了仿真和测试,模拟和测试结果比较吻合,经过实验测试得到天线为水平和垂直双向辐射,天线的增益约为2.5dB,谐振频率约为3GHz,此天线有利于天线集成和与CMOS工艺等的兼容,并且对于无人驾驶飞机、卫星等飞行器的雷达和通讯等天线系统的设计具有参考价值。In this paper, a novel compact CPW-fed slot antenna was designed and fabricated on high-resistivity silicon （HR-Si） by micro-electronics process. The results of simulation are consistent with the results of measurement for the antenna. The mode of the antenna is vertical and horizontal bi-directional radiations. The gain of antenna is 2.5 dB and the resonance frequency approximately is 3 GHz. This fabrication can be compatible with antenna integration and CMOS process. The parameters of this antenna are for reference radar antenna system of Unmanned Aerial Vehicles （UAV）, satellite transmission and communication.

关 键 词：微小天线 高电阻率硅片 集成电路工艺 

分 类 号：TN92[电子电信—通信与信息系统]