极板不平行对力反馈微加速度传感器可靠工作范围的影响  

EFFECT OF NON-PARALLEL PLATES OF FEEDBACK-BALANCED MICRO ACCELEROMETER ON RELIABLE OPERATION RANGE

作　　者：吴浩[1] 车录锋[1] 王俊杰[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室

出　　处：《机械强度》2007年第5期745-748,共4页Journal of Mechanical Strength

基　　金：国家自然科学基金(60304019);863计划(2004AA404210)资助项目~~

摘　　要：根据梳齿式电容加速度传感器极板不平行对传感器静电力和阻尼力的影响,建立有阻尼力反馈微加速度传感器的等效电学模型。通过电学模拟,分析不同阻尼情况下由工艺原因引起的电容极板不平行对传感器可靠工作范围的影响。结果表明,当传感器受阶跃信号的冲击时,可靠工作范围随极板倾斜程度的增大而减小,并且模拟结果还表明,在欠阻尼情况下传感器的可靠工作范围比临界阻尼或过阻尼情况下要小。The influence of non-parallel plates on the characters of capacitive accelerometer＇ s damping force and electrostatic force is thought about and the equivalent circuit model of damped feedback-balanced accelerometer is founded. By the simulation of the circuit, the reliable operation range of the accelerometer with non-parallel capacitive plates caused by the technique on quasi-static and light damping is investigated. The results show that when the angle of decline in capacitor plate increases, the reliable operation range of the accelerometer decreases. And the simulation results also show that the reliable operation range of the accelerometer in light damping is smaller than that in quasi-static situation.

关 键 词：加速度传感器 非平行极板 阻尼 等效电学模型 阶跃响应 可靠工作范围 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]