利用非规整膜系实现宽角度入射减偏振、减反射薄膜的研究  

Study of Anti-polarization and Antireflection Coatings of Broad Angle Ranges by Inhomogeneous Coatings

作　　者：徐晓峰[1] 邢怀中[1] 杜西亮[2] 范滨 

机构地区：[1]东华大学应用物理系,上海201620 [2]黑龙江大学电子工程学院,哈尔滨150080 [3]日本光驰有限公司

出　　处：《光子学报》2007年第9期1691-1693,共3页Acta Photonica Sinica

摘　　要：利用非均匀膜系理论对宽角度入射减偏振、减反射薄膜进行优化设计,分析了在宽角度入射的情况下,偏振光产生透过率不同的原因,选取了Na3AlF6、Ta2O5和Al2O3三种不同折射率材料,采用BK7作为基底,模拟设计了光谱区在500 ～560 nm波段、入射角为0 ～70°之间的多层减偏振、减反射薄膜,设计结果表明,薄膜的透过率得到大幅度提高.Both anti polarization and antireflection coatings were designed and optimized by means of inhomogeneous coatings theory. The reason for different transmittance caused by polarized light was analyzed in the case of broad angle incidence. By means of selecting Na3AlF6 ,Ta2O3 and Al2O3 as different transmittance materials of multilayer and utilizing BK7 as the materials of substrate,both anti-polarization and antireflection multilayer of wave length between 500 nm and 560 nm and incidence angle from 0° to 70° have been designed. The design result indicated that the transmittance has been increased greatly.

关 键 词：光学薄膜 非均匀膜系理论 减反射薄膜 减偏振 透过率 

分 类 号：O484.4[理学—固体物理]