非对称轴向二极场下等离子体特性的研究  

The Investigation of Plasma Characteristics in Non-symmetric Axial Two-pole Field

作　　者：叶超 宁兆元 

机构地区：[1]苏州大学物理科学与技术学院薄膜材料实验室,苏州215006

出　　处：《真空科学与技术》1997年第2期106-109,共4页Vacuum Science and Technology

摘　　要：对非对称轴向二极场下等离子体的特性进行了分析，在这种微波从弱场向强场入射的情况下，可以形成高密度等离子体，其原因为：在低气压下，L波经过ω＝ωpe（电子等离子体频率）层时，转变为R波，然后在电子回旋共振（ECR）区被共振吸收；在高气压下，微波窗口附近的碰撞吸收和ECR区的共振吸收并存的结果。这对于进一步发展永磁微波ECR等离子体薄膜沉积技术以及探讨在微波ECR等离子体环境下的成膜机理是有利的。In this paper,the plasma characteristics in non-symmetric axial two-pole field are analyzed.High density plasma can be produced in the case of incident microwave from low field to high field, the cause of producing high dens1ty plasma is that L wave is transformed into R wave in ω=ωpe region,then it is absorbed by resonance at ECR region at low pressure. Collision absorption at microwave window and resonance absorption at ECR region produce high density plasma at high pressure. It is contributive to developing the deposition technology of permanent-magnet microwave ECR plasma thin films and investigating the mechanism of thin film formation.

关 键 词：等离子体 电子回旋共振 轴向二极场 薄膜沉积 

分 类 号：O532.11[理学—等离子体物理] TB43[理学—物理]