高分辨率傅里叶变换透镜  

High-resolution Fourier transform lens

作　　者：张雷[1] 钟兴[1] 金光[1] 贾继强[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所

出　　处：《光学精密工程》2007年第9期1317-1321,共5页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60575025)

摘　　要：在研究傅里叶变换透镜理论的基础上,根据某微粒子观测实验的要求和几何光学像差理论,得出了高分辨率傅里叶透镜的初始参数,分析了系统的消像差方法,并应用ZEMAX软件设计了满足要求的工作波长为532 nm的傅里叶变换透镜。在光机结构设计中,为减少外界环境对成像质量的影响,在频谱面处设计了光阑和低真空腔。工程分析和实验结果表明,抽真空引起的光学间距变化对该系统的成像质量基本没有影响,用目视显微镜法检测系统的分辨率为2.81μm。该系统可以保持12 h的低真空(100 Pa以下),并且已成功应用于某微粒子观测实验。According to the theory of geometrical optics and the requirements of a particle observation experiment, the systematic initial parameters were researched and a 532 nm Fourier transform lens was designed using ZEMAX. The opto-mechanical structure was designed according to the system feature. By using the software of finite element method, the influence of vacuum on optics spacing and mirror surface shape was analyzed. The analytical and experiment results indicate that the changes of optics spacing and mirror surface shape caused by vacuum can not affect on the imaging quality. The testing experiment using the visual microscope shows that the system resolution is 2.81μm. After the alignment, the system can keep low-vacuum （lower than 100 Pa） 12 h. And the system has already been used in the particle observation experiment successfully.

关 键 词：傅里叶变换透镜 光学设计 光机结构 

分 类 号：TH703[机械工程—仪器科学与技术]