大型超精密机床导轨卸荷系统结构设计与测试  

Structure design and test for guide unloading system of large ultra-precision machine

作　　者：张景和[1] 张顺国[1] 赵海潇[1] 何远新[1] 董申[1] 

机构地区：[1]哈尔滨工业大学机电工程学院精密工程研究所,黑龙江哈尔滨150001

出　　处：《光学精密工程》2007年第9期1383-1390,共8页Optics and Precision Engineering

基　　金：国家十五攻关资助项目(No.41318.2.12)

摘　　要：设计制造了一种新型的,适用于大型超精密机床的导轨卸荷系统。分析了卸荷系统中弹簧数量对卸荷系统性能的影响,并设计了连接卸荷浮板与导轨负荷的卸荷弹簧机构用于精确调整卸荷量的大小,并测试了卸荷弹簧的刚度。设计了卸荷浮板结构并对其在不同供气压力下的气膜厚度、气膜刚度与承载能力进行了计算,设计并校核了卸荷梁。用单尺反转法,测试了卸荷系统作用下的主导轨直线度精度,当卸荷量为1200 kg时,主导轨直线度为0.375μm/600 mm;在卸荷系统作用下,该机床加工出了1000 mm的铝件,表面粗糙度Ra达到了12 nm。实验结果表明,本文设计的卸荷系统机构,能够保证超精密机床主导轨达到高精度的直线度要求。A new unloading system was designed for large ultra-precision machine and the influence of the system＇s spring number on the unloading system＇s performance was analyzed. Then, the unloading spring＇s specific structure used to link the unloading air-floated flat and guide load was designed to ad- just unloading weight precisely. The rigidity of unloading spring was also measured. An unloading air-floated flat＇s structure was designed and the thickness and stiffness of gas film, load-bearing capaci- ty under different air pressures of the structure were calculated. An unloading beam was designed and checked. Finally, the guide＇s line error was measured under the effect of unloading system. The measuring results show that when unloading weight is 1 200 kg, the guide＇s linearity error can be less than 0. 375 μm/600 mm. Under the unloading system, when the machine tool processes Φ1 000 mm aluminum work piece, roughness of surface is 12 nm.

关 键 词：超精密机床 卸荷系统 结构设计 直线度测量 

分 类 号：TH703[机械工程—仪器科学与技术]