RE_(0.5)Sr_(0.5)CoO_(3-δ)/YSZ薄膜的微观组织研究  

Microstructures of RE_(0.5)Sr_(0.5)CoO_(3-δ)/YSZ Thin Films

作　　者：张利文[1] 丁铁柱[1] 朱志强[1] 王强[1] 姜涛[1] Somei Ohnuki 王永明 

机构地区：[1]内蒙古大学,内蒙古呼和浩特010021 [2]Hokkaido University,Sapporo 060-8628,Japan

出　　处：《稀有金属材料与工程》2007年第9期1570-1573,共4页Rare Metal Materials and Engineering

基　　金：国家自然科学基金项目(10464001);内蒙古大学513人才计划项目

摘　　要：采用离子束溅射法在氧化钇稳定的氧化锆(YSZ)单晶衬底上生长了RE0.5Sr0.5CoO3-δ(RE=La,Pr,Nd)薄膜。采用X射线衍射(XRD)仪和扫描电镜(SEM)测试了RE0.5Sr0.5CoO3-δ(RESCO)薄膜的微结构和表面形貌。结果表明:RE0.5Sr0.5CoO3-δ系列薄膜沿<110>方向择优生长;La0.5Sr0.5CoO3-δ(LSCO)薄膜在550℃热处理后呈现Ostwald生长,具有分散的岛状结构,在热处理温度达到750℃时岛状结构发生靠拢,同时晶粒度增大;Pr0.5Sr0.5CoO3-δ(PSCO)薄膜在750℃热处理后具有长程有序结构,呈现枝晶生长。RE0.5Sr0.5CoO3-δ（RE=La, Pr, Nd ） thin films were grown on the yttria-stabilized zirconia （YSZ） single crystal substrates by ion-beam sputtering method and measured by X-ray diffraction （XRD） and Scanning Electron Microscopy （SEM） to study the surface morphology and microstructure of RE0.5Sr0.5CoO3-δ thin films. The results show that the RE0.5Sr0.5CoO3-δ thin film has 〈110〉 preferred orientation, and the Ostwald growth and an island structure were presented in the La0.5Sr0.5CoO3-δ（LSCO） thin film when heat-treated at 550 ℃, and the grain size becomes bigger and the island structure conglomerates when heat-treated at 750 ℃, showing a long-range order structure and the dendritic growth.

关 键 词：RE0.5Sr0.5CoO3-δ薄膜 SEM 表面形貌 微结构 

分 类 号：TB383.2[一般工业技术—材料科学与工程]