介观压阻效应在硅微加速度计中的应用  

Applications of Meso-piezoresistance in the Silicon Micro-accelerometer

作　　者：王辉[1] 吴瑞[1] 温廷敦[1] 

机构地区：[1]中北大学微米纳米技术研究中心,山西太原030051

出　　处：《微计算机信息》2007年第29期182-184,共3页Control & Automation

基　　金：国家自然科学基金(批准号:60476043)资助项目

摘　　要：为了突破传统机电转换局限,提高加速度计灵敏度,提出以介观压阻效应为工作原理制作高灵敏度的硅微加速度计,基于这种原理设计一种四梁岛结构,通过理论分析与仿真计算,得出该结构在1gn输入下的输出,并对介观压阻灵敏度和压阻灵敏度的量级作出了比较,从理论上验证了采用介观压阻效应制作高灵敏度传感器的可行性,为此类加速度计的设计提供参考。A high sensitivity silicon micro-accelerometer based on meso-piezoresistance is proposed, in order to break through the traditional electro-mechanical transformation and enhance the accelerometer sensitivity. Based on this principle, a Four-beam structure is designed. The signal output of the structure with lgn input is obtained in theoretic analysis and emulational calculation, furthermore, the magnitude of the piezoresistance sensitivity is compared with that of meso-piezoresistance. The feasibility of the high sensi- tivity sensor based on meso-piezoresistance is validated, which is helpful to the design of such kind of acceleration sensors.

关 键 词：介观压阻效应 加速度计 灵敏度 共振隧穿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]