结合ELID磨削与磁流变光整加工的单晶硅反射镜超精密制造技术  

Nano-Precision Finishing Process Integrated with ELID-Grinding and MRF for Silicon Mirror

作　　者：尹韶辉[1] 陈逢军[1] 张导成[1] 大森整 林伟民[2] 上原嘉宏 

机构地区：[1]湖南大学国家高效磨削工程技术研究中心,长沙410082 [2]日本理化学研究所,东京3510198

出　　处：《纳米技术与精密工程》2007年第3期220-223,共4页Nanotechnology and Precision Engineering

摘　　要：分析了在线电解修整(ELID)磨削和磁流变光整加工(MRF)的加工原理与特点,充分结合这2种技术的优点对单晶硅反射镜进行纳米级精度的组合加工.首先进行ELID高效率磨削,在线检测工件表面误差后进行补偿磨削,使反射镜面加工成形,并获得较好的形状精度和表面质量.然后,利用磁流变技术进行确定性的光整加工,以减少反射镜的亚表面损伤,使加工表面的形状精度与表面粗糙度得到很大提高与改善.利用该组合工艺,对硅反射镜进行了系列的加工实验,高效率地得到了低于1 nm RMS的表面粗糙度和69 nmP-V形状精度的工件表面.The machining principles and characteristics of electrolytic in-process dressing （ELID）-grinding and magnetorheological finishing （MRF） were analyzed, and new ultra-precision synergist/c finishing process integrated with ELID-grinding and MRF was applied to nano-precision finishing for silicon mirror. ELID-grinding, as pre-finishing, was employed to shape rapidly and obtain a relatively good surface smoothness and form precision in high efficiency by in-situ measuring system. MRF, as the final finishing, was used to decrease sub-surface damage to obtain better form precision and surface roughness. Several sets of plane finishing experiments for silicon mirror were carried out, and micro-surface roughness 1 nm RMS and form precision 69 nm P- V were obtained.

关 键 词：单晶硅反射镜 在线电解修整 磁流变光整加工 形状精度 表面粗糙度 

分 类 号：TG66[金属学及工艺—金属切削加工及机床]