利用飞行时间质谱研究热阴极蒸发特性  

Time of Flight Mass Spectroscopy Study of Thermonic Cathode Evaporation

作　　者：刘燕文[1] 田宏[1] 韩勇[1] 陆玉新[1] 赵青兰[1] 徐振英[1] 孟鸣凤[1] 张哓伟[1] 王晓艳[1] 张洪来[1] 

机构地区：[1]中国科学院电子学研究所,北京100080

出　　处：《真空科学与技术学报》2007年第5期437-441,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：提出了采用飞行时间质谱(ToFMS)分析阴极蒸发的成分和速率的新方法。利用ToFMS测试了真空本底、氧化物阴极、浸渍阴极、覆膜阴极等各种阴极蒸发物的成分。研究了阴极蒸发速率与阴极温度和加热时间的关系。比较了不同阴极蒸发速率的大小。实验结果表明ToFMS是一种非常快捷的研究阴极蒸发的实验手段。最后,研究了阴极各种成分离子峰强度与电离电压的关系。Chemical compositions of the evaporated materials from different types of thermonic cathodes were studied with time-of-fight mass spectroscopy （ToFMS）. The influence of the cathode temperature and heating time on the evaporation rate was studied. In addition, the relation between the peaks intensiy of various ions, and the including Ba^ ＋ , Ba^2 ＋ and BaO^ ＋ , and the ionization voltages was discussed. We suggest that ToFMS works fast and effective in characterizing evaporation of thermonic cathodes.

关 键 词：阴极蒸发 飞行时间质谱 蒸发速率 离子流 

分 类 号：O461.1[理学—电子物理学]