KDP晶体单点金刚石车削表面形貌分形分析  

Fractal analysis on topography of KDP surfaces by single point diamond tools method

作　　者：庞启龙[1] 陈明君[1] 王景贺[1] 程凯[1] 

机构地区：[1]哈尔滨工业大学精密工程研究所,黑龙江哈尔滨150001

出　　处：《强激光与粒子束》2007年第9期1487-1491,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金资助课题(50405011)

摘　　要：分别使用2维和3维分形方法对单点金刚石车削加工的KDP晶体表面形貌进行了分析,并对表面的3维分形维数和3维粗糙度表征参数进行了比较,分析了二者对表面形貌表征的差异。使用2维轮廓分形方法计算了KDP晶体表面圆周各方向上的分形维数。通过分析得出:3维分形维数与表面粗糙度值成反比关系;使用单点金刚石车削方法加工KDP晶体会形成各向异性特征明显的已加工表面,在一定程度上容易形成小尺度波纹;已加工表面是否具有明显的小尺度波纹特征与表面粗糙度值并无直接关系,但与其表面轮廓分形状态分布密切相关;KDP晶体表面2维功率谱密度与其分形状态具有相近的方向性特征。2D and 3D fractal methods are used to analyze the KDP crystal surfaces machined by SPDT（single point diamond tools） method. The difference between 3D fractal dimension and roughness parameter is analyzed. And 3D fractal dimension has the inverse ratio with 3D roughness. Through 2D profile fractal analyses, it is found that the KDP crystal surfaces machined by SPDT method are strongly anisotropic and microscale wavenesses form to impact the optical performance of KDP components. The microscale waveness is incorrelate with roughness in certain range but has a direct relationship with the profile fractal dimension distribution of machined surface. Hence the microscale waveness can be reduced by adopting reasonable cutting parameters when the same roughness is maintained. In addition the profile fractal dimension distribution has a close directional form with its 2D power spectral density.

关 键 词：KDP晶体 各向异性 单点金刚石车削 小尺度波纹 3维分形 表面形貌 

分 类 号：TH161.14[机械工程—机械制造及自动化]