金属陶瓷多弧离子镀TiN/TiAlN涂层的结构与性能  

Microstructure and Properties of TiN/TiAlN Coating Ion-Plated on Cermets

作　　者：郑立允[1] 熊惟皓[2] 王玉果[3] 赵立新[1] 

机构地区：[1]河北工程大学,河北邯郸056038 [2]华中科技大学,湖北武汉430074 [3]天津大学,天津300072

出　　处：《稀有金属材料与工程》2007年第A02期718-720,共3页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(50074017);教育部博士点基金(1999048714)

摘　　要：采用多弧离子镀技术在Ti(C,N)基金属陶瓷基体上沉积了TiN/TiAIN涂层,通过扫描电镜、能谱仪、X射线衍射仪、原子力显微镜等分析技术对其显微组织、成分、相结构、粗糙度及涂层与基体间的结合强度进行了分析。结果表明,多弧离子镀TiN/TiAIN涂层后试样的表面为金黄色,涂层光滑平整,其均方根粗糙度为20.6 nm,显微硬度达到2808 HK。TiN相和TiAIN相均存在强烈的(111)择优取向。Al的含量从涂层内部到表面逐渐增大,呈现梯度分布特征。TiN/TiAIN涂层与金属陶瓷之间的结合强度高达57.52 N。Ti（C,N）-based cermets were coated with a TiN/TiAlN coating using multi-arc ion-plating technology. The microstructure, components, phase structure, roughness and adhesive strength were characterized using scanning electron microscopy, energy dispersive X-ray detector, X-ray diffraction, atomic force microscope. The TiN/TiAlN coating showed golden color, compact microstructure. The surface of the multi-layer coating was smooth and brilliant and TiN and TiAlN phases had intense （111） texture. The microhardness of the coating reached 2808 HK. The aluminium content increased from the inner coating to the top coating and showed gradient charateristic. The coating＇s adhesive strength to the matrix reached 57.52 N.

关 键 词：金属陶瓷 多弧离子镀 涂层 梯度 

分 类 号：TG174.4[金属学及工艺—金属表面处理]