La_(0.9)Sr_(0.1)MnO_3/Si体系界面的电子显微学研究  

Transmission electron microscopy study of the La_(0.9)Sr_(0.1)MnO_3/Si interface

作　　者：成丽娜[1] 马秀良[1] 

机构地区：[1]中国科学院金属研究所沈阳材料科学国家(联合)实验室,辽宁沈阳110016

出　　处：《电子显微学报》2007年第4期298-301,共4页Journal of Chinese Electron Microscopy Society

基　　金：国家杰出青年基金项目(No.50325101);国家重点基础研究发展规划(973)项目(2002CB613503)资助

摘　　要：本文利用透射电子显微术,研究了通过激光分子束外延方法在Si基体上生长的La0.9Sr0.1MnO3功能薄膜的显微结构特征及界面处的微区成分分布规律。结果表明,在Si基体上生长的La0.9Sr0.1MnO3薄膜由单相多晶体构成。这些多晶体颗粒以柱状结构生长,柱状晶垂直于界面并一直贯穿整个LSMO薄膜。La0.9Sr0.1MnO3薄膜具有正交点阵结构,其颗粒大小为10 nm^20 nm。在LSMO/Si的界面处发现了由化学反应引起的两个纳米尺度的非晶层。Thin film of La0.9Sr0.1MnO3/Si prepared by laser molecular beam epitaxy on Si substrate was characterized by means of transmission electron microscopy. The La0.9Sr0.1MnO3 film has an orthorhombic structure and it was polycrystallined with grain size of 10 nm - 20 nm. The grains of La0.9Sr0.1MnO3 displayed a columnar growth normal to the interface. Between the La0.9Sr0.1MnO3 film and Si substrate, two amorphous layers with nanometer dimensions were identified. The formation mechanism of these amorphous layers is proposed on the basis of EDS composition scanning.

关 键 词：La0.9Sr0.1MnO3薄膜 界面结构 成分分布 

分 类 号：O484.5[理学—固体物理]