利用扫描隧道显微镜构建纳米结构  

Fabricating artificial nanostructures with a scanning tunneling microscope

作　　者：李绍春[1] 贾金锋[2] 薛其坤[1] 

机构地区：[1]中国科学院物理研究所,北京100080 [2]清华大学物理系,北京100084

出　　处：《电子显微学报》2007年第4期363-369,共7页Journal of Chinese Electron Microscopy Society

基　　金：科技部973项目(2002CB613500);国家自然科学基金资助项目(No.90406015).~~

摘　　要：通过对在Si(111)-7×7表面上生长的Pb岛施加脉冲偏压,Pb岛受到触发而自发再生长。通过调节操纵参数(如脉冲电压的大小和时间),岛的高度及形状可以较精确地控制。用这种方法,我们可以制造出一些特定形状的纳米结构,例如中空和半中空的纳米阱等,还可以在更大尺度(微米)上进一步构建由这些纳米结构单元构成的图案。在纳米结构的构建过程中,还观察到了量子效应对薄膜生长的影响。We reported a novel method of constructing nanostructures with atomic layer precision, by manipulating a large number of atoms using a scanning tunneling microscope. By applying pulse voltages on the as-grown Pb island on Si（ 111 ）-7 × 7 surface, the target island can be triggered to re-grow simultaneously, and the height and shape of the target island were precisely controllable through regulating the manipulation parameters. Artificial nanostructures, such as nanomesas, center-full-hollowed and half-hollowed nanowells, as well as largescale nanostructure patterns coued be created by this way. Quantum size effects on the growth of thin films were observed and discussed.

关 键 词：扫描隧道显微镜 原子操纵 Si(111)-(7×7) PB 纳米结构 

分 类 号：TB383.1[一般工业技术—材料科学与工程]