超细晶／纳米晶铝膜的研究现状  

Research Progress in Ultrafine Grain/Nanocrystailine Al Films

作　　者：杨栋华[1] 欧信兵[1] 张津[1] 

机构地区：[1]重庆工学院材料科学与工程学院,重庆400050

出　　处：《材料导报》2007年第10期109-112,共4页Materials Reports

摘　　要：综述了超细晶/纳米晶铝膜的制备技术和制备工艺参数如衬底类型、氩气分压和靶功率等对铝膜结构性能的影响;介绍了目前超细晶/纳米晶铝膜的显微组织、铝薄膜及超薄铝薄膜的研究和其机械性能等研究方面的现状和进展,并展望了超细晶/纳米晶铝膜研究的发展前景。The preparation techniques of ultrafine-grain/nanocrystalline Al films are reviewed and the influence of technical parameters, such as substrates, argon gas pressure and target power on the microstructure and properties of Al films are summarized as well. Research progress in the microstructure and properties of ultrafine-grain/ nanocrystalline Al films, and the study of Al thin films/uhrathin films are introduced. The future development of ultrafinegrain/nanocrystalline Al films is also presented objectively.

关 键 词：超细晶/纳米晶 铝膜 制备 性能 

分 类 号：TB383[一般工业技术—材料科学与工程]