用于非球面检测的计算全息设计及其精度分析  

Design and error analysis of the CGH used for aspheric test

作　　者：康果果[1] 谢敬辉[1] 刘祎[2] 

机构地区：[1]北京理工大学信息科学技术学院光电工程系,北京100081 [2]北京航空精密机械研究所精密制造技术航空科技重点实验室,北京100076

出　　处：《光学技术》2007年第5期654-657,共4页Optical Technique

基　　金：武器装备预言基金项目(51464030304BQ0101)

摘　　要：介绍了用于非球面检测计算全息(Computer-generated hologram,CGH)的设计方法和步骤,对CGH位相分布求取、载频选取、CGH与干涉仪配合校准所涉及的关键问题展开了讨论,提出了一些全新的设计理念和方法。从理论上定量分析了CGH片基面型误差、全息图样偏差、刻蚀深度不均匀性和线宽不均匀性对再现波面的影响,得出了相应的误差公式指导计算全息元件加工环节的公差分配。给出了一个设计实例,检测不确定度达到λ/20。Design method and procedures of computer-generated hologram（CGH） used for aspheric test are introduced. Key questions about calculation of CGH phase function, selection of cartier frequency, position search of interference pattern and alignment of CGH to interferometer are discussed. Some new design notions and methods are proposed. Substrate figure error, pattern distortion, etching and duty cycle variations that influence the reconstructed wavefront are quantitatively analyzed in .theory and corresponding error equations are obtained to guide the tolerance distribution during CGH fabricating. A design example is given and the uncertainty of measurement achieve.

关 键 词：计算全息 二元光学元件 菲涅尔波带板 非球面反射镜 

分 类 号：TN949.191[电子电信—信号与信息处理]