两种电极结构等离子体发生器的静态电场计算  

Static Electric Field Intensity Calculation of Two Kinds of Electrode Structure Plasma Generator

作　　者：江中和[1] 胡希伟[1] 刘明海[1] 孙承志[1] 张跃飞[2] 陈光良[2] 葛袁静[2] 张广秋[2] 

机构地区：[1]华中科技大学电气与电子工程学院,武汉430074 [2]北京印刷学院,北京102600

出　　处：《高电压技术》2007年第9期192-195,共4页High Voltage Engineering

摘　　要：鉴于高气压下的沿面介质阻挡放电发生器在工业应用以及等离子体电磁屏蔽技术领域的重要应用前景,在梳状电极结构的沿面介质阻挡放电发生器基础上设计了两种电极结构的等离子体发生器,并通过边界元方法得到两种结构类型沿面放电发生器的静态场强分布。从计算结果来看,相比较于梳状电极结构的沿面放电发生器,改进后的放电发生器在空间的分布更有利于在高气压下产生较厚的等离子体层。实验结果表明:这两种结构形式的发生器放电效果明显优于梳状电极结构的发生器。High pressure dielectric barrier discharge generator can he applied in many fields, for example, thin film deposition, plasma etching, improving biocompatibility, plasma chemistry, synthesis of nano materials due to their enhanced plasma chemistry, and the absorption and reflection of electromagnetic waves electromagnetic shield tech- nology of plasma. In this paper, two kinds of high pressure surface dielectric barrier discharge generator are designed and their static electric field is calculated by boundary-element-method （BEM）. The results indicate that, when the static anode and cathode voltage is about ± 10 kV respectively, in such area of which the vertical distance to the electrodes plane is from 5 mm to 10 ram, the maximal static electric field intensity is still about 1 000 V/mm. Comparing to the combed electrodes surface discharge generator, this electric field distribution of the improved generators is greatly in favor of the enhancement of plasma thickness in high pressure. And according to the numerical calculated results, two kinds of high pressure surface dielectric barrier discharge generator are developed, and the corresponding experiment results prove that the effects of two kinds of discharge generator are better than that of the combed electrode.

关 键 词：沿面介质阻挡放电 边界元方法 电场强度 梳状电极 场强分布 等离子体层 

分 类 号：TN136[电子电信—物理电子学]