等离子复合渗镀陶瓷层腐蚀磨损性能的研究  

Study on Corrosion and Wear Resistance of Ceramic Multi-permeating Coatings by Plasma Discharge Technique

作　　者：刘燕萍[1] 邢飞[1] 谷海霞[1] 

机构地区：[1]太原理工大学机械工程学院,山西太原030024

出　　处：《中国表面工程》2007年第5期19-22,26,共5页China Surface Engineering

基　　金：国家自然科学基金;上海宝钢集团公司联合资助项目(50374050)

摘　　要：利用等离子渗金属技术、尖端放电、空心阴极效应和反应气相沉积技术,在碳钢表面形成具有扩散层和沉积层的新型复合渗镀TiN沉积层+TiN析出相+Ti扩散层,并在此基础上用磁控溅射PVD沉积TiB2薄膜,对其耐蚀性、耐磨性进行了检测和分析。结果表明:由于等离子TiN复合渗镀层的均匀性、致密度高于PVD沉积TiB2薄膜,在1mol/LH2SO4溶液中耐腐蚀性能是PVD沉积TiB2+等离子TiN复合渗镀层11.7倍。TiB2/TiN复合渗镀层与碳钢基体直接PVD沉积TiB2相比硬度高达2600HV,膜层比较厚,表面光滑、平整薄膜覆盖,膜基结合力也很强,有很好的减磨耐膜性能。说明等离子渗金属技术制备的TiN渗镀复合层不仅具有优异的耐腐蚀性能同时对TiB2陶瓷有着强有力的支撑作用。The TiN multi-permeating coatings consisted of deposition layer and diffusion layer were prepared on carbon steel by a new compound process, containing plasma discharge, tip discharge, hollow-cathode effect and reactive sputtering, and then TiB2 film was deposited （PVD） to form TiB2/TiN multi-permeation layer. A comparative research on corrosion resistance and friction-abrasion property of TiN/TiB2 multi-permeation layer and TiB2 film was investigated. The results showed that the corrosion resistance of TiN multi-permeation layer was increased almost 11.7 times that of TiB2/TiN layer in the lmoL/L H2SO4 solution. Surface microhardness of TiN/TiB2 multi-permeation layer was higher, reaching 2 600 HV; the average friction coefficient was lower, and wear resistance was better. The bonding strength was so high that there was no any spalling phenomenon. The internal stress and thermal expansion coefficient were low due to the existence of transition layer of Ti diffusion. The TiN/Ti permeation multilayer can enhance load-bearing capacity to the coating and increase adhesion strength and corrosion-resisting properties.

关 键 词：等离子辉光放电 PVD TIN TIB2 耐蚀性 耐磨性 

分 类 号：TG156[金属学及工艺—热处理]