MEMS传感器和智能传感器的发展  

Development of MEMS Sensor and Intelligent Sensor

作　　者：刘凯[1] 陈志东[1] 邹德福[1] 马丽敏[1] 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043

出　　处：《仪表技术与传感器》2007年第9期9-10,66,共3页Instrument Technique and Sensor

摘　　要：MEMS传感器和智能传感器是新型传感器的代表,具有集成化和智能化的特点。介绍了2种传感器的最新发展状况,包括测量精度、灵敏度、体积、转化机理、融合理论等方面。列举了2种传感器的应用实例,如仿生机器人、微纳卫星、计算机视觉系统等。分析了传感器发展的趋势,涉及精度、可靠性、微型化、微功耗、智能化、数字化等方面。MEMS sensor and intelligent sensor are the representation of new sensor, they have the characteristics of integration and intelligentize. Introduced step-press development complexion of sensors, including measurement precision, delicacy, volume, translation mechanism, amalgamation theory,etc. Enumerated application example, such as bionics robot, minimize secondary planet, computer vision system, etc. Analyzed the development trend oft he sensor, such as precision, security, micromation, rainuteness power wasting, intelligent, numeric, etc.

关 键 词：NEMS 智能传感器 集成 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]