误差扩散法设计用于惯性约束聚变驱动器的色分离光栅-光束采样光栅集成元件  

Design of Combined Color-Separation Grating and Beam-Sampling Grating Element Used in Inertial Confinement Fusion Driver with Error-Diffusion Method

作　　者：张怡霄[1] 姚欣[1] 高福华[1] 郭永康[1] 

机构地区：[1]四川大学物理系,成都610064

出　　处：《光学学报》2007年第10期1788-1792,共5页Acta Optica Sinica

基　　金：国家自然科学基金-中国工程物理研究院联合基金(10376019)资助课题

摘　　要：针对多次曝光法制作集成衍射光学元件时存在的加工制作复杂,会引入较大的对位误差等问题,基于计算全息中的误差扩散编码原理及部分相干光成像理论,提出采用误差扩散编码方法来设计用于制作浮雕结构集成元件的编码掩模的新方法。给出了利用误差扩散法设计的色分离光栅-光束采样光栅(CSG-BSG)集成元件编码掩模,模拟计算了经部分相干成像系统后的空间像光强分布,并与理想的集成元件面形进行了比较。结果表明,校正后均方差为7.5%,体积偏差为10.2%。The multiple exposure method has been proposed to fabricate combined diffractive optical element, but the multiple etch processing is complex and large alignment error will be introduced. According to error-diffusion method in computer-generated hologram （CGH） and partial coherent imaging theory, a new method to design coding mask of profile-combined element with error-diffusion method is presented. The designed coding mask for colorseparation grating and beam-sampling grating （CSG-BSG） combined optical element with error-diffusion method is illustrated , and the intensity distribution of the spatial image in partial coherent imaging system is simulated, compared with ideal combined element relief. It shows that mean-square error is 7.5 % and volume error is 10.2 % after correction.

关 键 词：集成光学 误差扩散 灰阶编码 色分离光栅(CSG) 光束采样光栅(BSG) 惯性约束聚变驱动器 

分 类 号：TL632.1[核科学技术—核技术及应用]