全息平面变间距光栅位移传感器研究  

Study on Position Sensor of Holographic Variable Line-Space Plane Gratings

作　　者：楼俊[1] 付绍军[2] 刘正坤[2] 徐向东[2] 何世平[2] 李秉实 吴忠 

机构地区：[1]中国计量学院光电子技术研究所,杭州310018 [2]中国科学技术大学国家同步辐射实验室,合肥230029 [3]西安航空618研究所,西安710065

出　　处：《光子学报》2007年第4期655-658,共4页Acta Photonica Sinica

基　　金：国家自然科学基金(50375149 ;10272098);航空科学基金(01I1810);中国计量学院校立基金(2006YB04)资助

摘　　要：基于变间距光栅位移传感器的基本原理,研究了高线密度变化率全息平面变间距光栅的制作方法.所作的变间距光栅已应用在变间距光栅位移传感器中,原理样机测试结果表明,系统分辨率可以达到0.05mm,相对误差可以控制在0.2%FS之内,优于设计指标.The principal of VLS grating position sensor and the method ot tabrlcatlon oI VLS gratings with holographic recording were briefly described. These gratings with large slope density distribution were used in position sensors. The preliminary results obtained were quite positive. The actual measurements show that the grating sensor has position resolution of 0.05 ram,and the relative error can be controlled in 0.2% FS.

关 键 词：全息光栅 变间距光栅 位移传感器 

分 类 号：O436[机械工程—光学工程] TH7[理学—光学]