二维光栅频谱分析及在精密测量中的应用  

The 2-D Grating′s Spectrum Analysis and Application in Precise Measurement

作　　者：夏豪杰[1] 费业泰[1] 王中宇[2] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《光子学报》2007年第4期726-729,共4页Acta Photonica Sinica

基　　金：国家自然科学基金(50375011);河南省杰出青年基金(02120001500)资助

摘　　要：根据傅里叶光学的相关理论对二维衍射光栅的频谱特性进行了分析,并对分析结果进行了模拟和实验验证;基于衍射光栅应用于微位移的理论,提出利用二维衍射光栅作为测量的基准元件,组成单个光源和单二维衍射光栅的二维平面微位移精密测量系统,并根据实验测量结果验证了这是一种具有纳米准确度的可行测量方法.　The Fourier method was employed to analyze the spectrum of 2-D diffraction grating,the induced results were simulated in Matlab, and the simulation was verified by the experimental photo.On the basic of these results,2-D diffraction grating used to measure 2-D displacements with high precision in nano-scale resolution, the structure using 2-D grating was given,interfere fringes were pictured,and the experimental results can meet the nano resolution measurement.

关 键 词：测量 二维光栅 频谱分析 位移 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]