微传感器压力测量系统  

Pressure Measure System According to Microsensor

作　　者：杨世忠[1] 邢丽娟[1] 

机构地区：[1]青岛理工大学自动化工程学院,山东青岛266520

出　　处：《仪表技术与传感器》2007年第8期64-65,共2页Instrument Technique and Sensor

摘　　要：压力是应用最为广泛的物理参数之一,压力测量在工业生产中必不可少。在研究微电容传感器的基础上,分析了压力测量的工作原理,提出一种基于微电容传感器的压力测量的设计方法,给出适合该种传感器的信号检测电路和压力测量系统组成。实践表明,此设计方法具有较高的准确性和应用推广价值。Pressure is one of the most extensive physics parameters, and pressure measure is essential in industry production. On the basis of researching capacitive microsensor, analyzes the work principle of pressure measure, proposes a kind of pressure measure design method basing on capacitive microsensors,and gives the detection circuit suiting this kind of sensor and the system composition of pressure measure. The practice shows that the design method has high accurate and the application promotion value.

关 键 词：压力 微传感器 电容式 测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]