索尔文制冷机低温泵  

SOLVAYCYCLE REFRIGERATOR CRYOPUMP

作　　者：罗吉友[1] 

机构地区：[1]核工业西南物理研究院

出　　处：《真空与低温》1997年第1期1-4,共4页Vacuum and Cryogenics

摘　　要：介绍自己研制的索尔文制冷机低温泵的压缩净化机组、改进型索尔文两级膨胀机以及低温泵体的设计及特点。目前已完成低温泵的中试生产，开始批量生产。The condensing cleaners of Solvay refrigerator cryopump developed at SWIP are presented,and the modified Solvay two stages expander and the design and the features of the cryopump are also introduced.At present ,the pilot production of cryopump has been finished,the batch production will begin soon.

关 键 词：制冷机 低温泵 抽气 

分 类 号：TB655[一般工业技术—制冷工程]