离子镀氮化钛涂层的工艺研究  

Study on the Processing of Titanium Nitride Coatings by Ion Plating

作　　者：肖国珍[1] 黄春良[1] 焦文强[1] 任虹 

机构地区：[1]西北有色金属研究院

出　　处：《稀有金属材料与工程》1997年第3期40-44,共5页Rare Metal Materials and Engineering

摘　　要：以纯钛板和全磨制高速钢钻头为基材，开展了ＨＣＤ型离子镀氮化钛涂层的工艺研究。结果表明，本研究确定的清洗工艺与涂覆工艺相结合，可以得到与基材结合良好，具有高显微硬度、色泽美观、性能稳定的氮化钛涂层。涂层后的高速钢全磨制钻头切削寿命平均增长１０倍以上。本研究得到的涂覆工艺参数：氮分压控制在１．６×１０－３Ｐａ～１．０×１０－１Ｐａ；沉积时间为６０ｍｉｎ～８０ｍｉｎ；负偏压、烘烤温度则分别控制在１０Ｖ～１００Ｖ、３００℃～４００℃之间；枪功率在２０ｋＷ左右。Taking pure Ti plates and full-ground drills as the samples, the processing of titanium nitride coatings by the hollow cathode discharge (HCD) method has been investigated It is shown that TiN coatings with good adhesion to the substrate, stable performance, high vickers microhardness and beautiful colour can be obtained by using the defined cleaning procedures and the coating processes After coating with TiN, the cutting lives of full-ground drills made of high speed steel have been increased by more than 10 times The coating process parameters acquired as a result of the investigation are as follows: nitrogen partial pressure of (1 6×10 -3 ～1 0×10 -1 )Pa; deposition time of (60～80) min; negative bias of (10～100)V; burning-off temperature of (300～400)℃;power of EB gun of about 20kW

关 键 词：离子镀 氮化钛 涂层 

分 类 号：TG174.45[金属学及工艺—金属表面处理]