厚膜压力传感器的研究  

A Study on the Thick Film Pressure Sensor

作　　者：潘晓光[1] 汤清华[1] 

机构地区：[1]华中理工大学固体电子学系

出　　处：《华中理工大学学报》1997年第5期82-84,共3页Journal of Huazhong University of Science and Technology

基　　金：华中理工大学校科学基金

摘　　要：用厚膜工艺制造压力传感器．研究了厚膜电阻浆料的电阻率与压阻系数的关系．承压基片选用ＺｒＯ２－Ｙ２Ｏ３３ｍｏｌ％增韧Ａｌ２Ｏ３陶瓷，大大地提高了压力传感器的性能．对承压片的应力分布进行了分析。Thick film technology has been used to prepare the pressure sensor. The relationship between the resistivity and the piezo resistance coefficient of the thick film resistive paste is studied. The Al 2O 3 ceramics toughened with ZrO 2 Y 2O 3 3mol% is selected as the pressure bearing substrate, which improves significantly the sensor performance. The stress distribution on the substerate is analyzed. The constructional design of the sensor is described.

关 键 词：厚膜 压力传感器 压阻效应 

分 类 号：TH823.2[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]