塑料光学模板的二元光学设计和制作  

The Design and Fabrication of Plastic Optic Masks by the Binary Optics Technology

作　　者：张国平[1,2] 叶嘉雄 李思涛[1,2] 徐启阳 

机构地区：[1]华中理工大学光电子工程系 [2]激光技术国家重点实验室

出　　处：《华中理工大学学报》1997年第4期18-20,共3页Journal of Huazhong University of Science and Technology

摘　　要：介绍了用于产生塑料光学模板的二元光学技术，衍射原理是设计塑料光学模板的理论基础，讨论了标量衍射理论和耦合波近似理论。用模拟退火算法优化了塑料光学掩膜的浮雕表面，模板的制作借鉴了超大规模集成电路的制作设备，并用二元光学技术设计了单焦和双焦塑料透镜的模板。The binary optic technology for producing plastic optic masks is described The diffraction principle is the theoretical basis. of the design of plastic optic masks, The scalar diffraction theory and the coupled-wave approach are discussed and the simulated annealing algorithm is applied to the opti- mization of the relief surfaces of plastic optic masks. VLS IC manufacturing facilities are used for the fabrication of the masks. The masks for two kinds of single-focal and bifocal intra-ocular plastic lens- es are designed and fabricated by binary optic technology.

关 键 词：模板 二元光学 塑料光学元件 光学器件 设计 

分 类 号：TH74[机械工程—光学工程]