新型高倍显微镜云纹测量技术及其应用  

New High-power Microscopy Moiré Measuring Techniques and their Applications

作　　者：谢惠民[1] 王庆华[1] 潘兵[1] 郭智强[1] 李艳杰[1] 戴福隆[1] 岸本哲 

机构地区：[1]清华大学工程力学系,北京100084 [2]日本国家材料科学研究所

出　　处：《实验力学》2007年第3期198-205,共8页Journal of Experimental Mechanics

基　　金：国家重点基础研究发展计划(2004CB619304);国家自然科学基金资助项目(10625209;10472050;1012120);北京市自然科学基金资助项目(3072007);教育部新世纪优秀人才支持计划对本研究工作的资助

摘　　要：本文介绍了两种新型的高倍显微镜云纹测量技术,即激光扫描共聚焦显微镜(LSCM)云纹法和扫描电子显微镜(SEM)云纹法。阐述了LSCM云纹和SEM云纹的形成及测量原理,同时对此两种云纹法加以对比,比较其各自的特点。此外,还对两种云纹法的应用进行探讨,针对测量物体表面变形和表征物体表面周期性结构特征这两类应用领域,分别以测量多晶铝合金板的残余变形和识别日本纹白蝶翅膀表面结构为例介绍LSCM云纹法的应用,以识别绿带翠凤蝶翅膀表面结构为例介绍了SEM云纹法的应用。实验结果证明了LSCM云纹法和SEM云纹法的可行性、灵活性及高灵敏度特性,均为高效、无损的全场测量技术,在微纳米尺度力学特性测量和表征方面有广泛的应用前景。This paper offers an introduction of two new high-power microscopy moiré measuring techniques, i. e. , Laser Scanning Confocal microscopy （LSCM） moiré Method and Scanning Electron Microscopy （SEM） moiré method. The formation and measurement principles of LSCM moiré method and SEM moiré method are described in detail and the comparison between these two moiré methods is discussed. According to two kinds of application areas, i. e., measuring deformation and characterizing periodic structure of object surface, applications of these two moiré methods are presented taking poly-crystal aluminum alloy plate and butterfly wing as the examples. LSCM moiré method is used to measure the residual deformation of poly-crystal aluminum alloy plate and characterize the surface structure of-Pieris rapae crucivora, while SEM moiré method is used to characterize the surface structure of Papilio maackii Menetries. Experimental results demonstrate the feasibility, flexibility and high sensitivity of LSCM moiré method and SEM moiré method, both of which are effective, nondestructive as well as full-filed measuring techniques and will find broad application prospects in micro/nano-mechanics measurement and characterization.

关 键 词：云纹 激光扫描共聚焦显微镜 扫描电子显微镜 铝合金板 蝴蝶 

分 类 号：O348[理学—固体力学]