光学读出非制冷红外成像的最新进展  

Advance in Optically Readable Uncooled Infrared Imaging

作　　者：董凤良[1] 焦斌斌[2] 张青川[1] 陈大鹏[2] 缪正宇[1] 熊志铭[1] 

机构地区：[1]中国科学技术大学中科院材料力学行为和设计重点实验室,合肥230027 [2]中科院微电子研究所,北京100029

出　　处：《实验力学》2007年第3期401-406,共6页Journal of Experimental Mechanics

基　　金：自然科学基金项目(No10472111;10627201)

摘　　要：针对以前红外成像中红外图像的噪声等效温度差(NETD)较大和空间分辨率不高的问题,本文在制作工艺改善的基础上,设计了一个单元尺寸分别是50μm×50μm和60μm×60μm的红外焦平面阵列(FPA),它是由0.5μm厚的SiNx和0.2μm厚的Au构成的双材料微悬臂梁阵列构成。微梁单元倾斜角的变化利用在谱平面刀口滤波的光学方法测量。FPA是利用基于体硅的表面微加工工艺制作的,利用制作的FPA的60μm×60μm单元区域和12bitCCD,得到了室温物体的热像。讨论了60μm×60μm单元区域的性能,给出了NETD在100mK左右。和以前的工作相比,红外图像的温度分辨率和空间分辨率都得到了明显改善。In the previous work, noise equivalent temperature difference （NETD） and spatial resolution of thermal images were not satisfactory. Based on the improved micro-fabrication technologies, this paper presents a new design of an uncooled infrared focal plane array （FPA）. The designed FPA includes 0.5μm thick SiNx film/0.2μm thick Au bimaterial micro-cantilever elements of 50μm×50μm and 60μm× 60μm. The inclination angle change of the cantilever elements in the IR imaging system is measured using an optical readout with a knife-edge filtering operation in the spectrum plane. An FPA has been fabricated with silicon bulk based surface micro-machining technologies. Using the 60μm × 60μm cantilever element zone of the fabricated FPA and a 12-bit CCD, thermal images of room temperature objects have been obtained. The performance of the zone of 60μm × 60μm cantilever elements has been discussed, and NETD has been improved to about 100mK. NETD and spatial resolution of the fabricated FPA are visibly improved compared with the previous work.

关 键 词：非制冷红外成像 光学读出 焦平面阵列 噪声等效温度差 

分 类 号：TB33[一般工业技术—材料科学与工程] O31[理学—一般力学与力学基础]