小深孔内径电容式测量方法的研究  

Research on Capacitance Measurement Instrument for Inner Diameter of Deep Holes

作　　者：周兴林[1] 于战果[2] 郑义忠[2] 

机构地区：[1]武汉科技大学,武汉430070 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《中国机械工程》2007年第21期2535-2538,共4页China Mechanical Engineering

摘　　要：采用电容式深孔内径测量仪测量机械加工过程中小深孔的孔径。该测量仪采用直径较小的电容探针作为传感器，电容探针通过采用驱动电缆技术消除了杂散电容的影响，将孔径的变化转换为电压的线性变化，并通过USB接口将此电压信号输入到计算机系统中进行处理。论述了小深孔内径电容式测量方法的基本原理，设计了电容式深孔内径测量仪测量小深孔孔径系统的总体方案。该方法特别适用于Φ1mm～Φ7mm深孔的内径自动检测，对夺3mm孔径进行了实际测量，并分析了测量所得到的数据，多次测量的标准差小于0．5μm，测量分辨率为0．05μm。A system, which used the capacitance sensor to measure the aperture of small blind holes, was studied. A capacitance probe with small diameter was used as the sensor. The capacitance instrument converted the change of the aperture in to the change of voltage signals which can be inputted into a computer through the USB interface to get processed. The working principle of the capacitance sensor and the electronic circuits of the capacitance instrument were discussed. The design scheme was also disserted as the system using the capacitance sensor to measure the aperture of small holes. The calibration of the sensor was done on the small blind holes with Φ3mm and Φ7mm aperture. From the analyzed experimental data, the resolution is 0.05μm, and the standard deviation of the experiments is within 0. 5μm.

关 键 词：小深孔 电容探针 传感器标定 驱动电缆 

分 类 号：TH711[机械工程—测试计量技术及仪器]