基于Ansys有限元法的电涡流位移传感器分析  

Analysis of eddy current displacement sensor based on FEM by using Ansys

作　　者：杨磊[1] 韩邦成[1] 孙津济[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《传感器与微系统》2007年第10期15-17,共3页Transducer and Microsystem Technologies

基　　金：民用航天科研专项计划资助项目([2004]1536)

摘　　要：为了满足磁悬浮飞轮系统高精度的位置检测要求,必须进行传感器性能的分析与设计。从涡流传感器的原理出发,利用Ansys软件进行有限元建模仿真,得到涡流传感器的阻抗与检测距离的关系,从而可得到经过测量电路后的输出电压受位移变化的影响。按照线圈仿真模型和电路中各元件的参数制成实际的传感器线圈检测回路,实验结果与仿真结果的一致性表明:基于Ansys的有限元分析法对涡流传感器设计有重要指导意义。The eddy current displacement sensor must be designed and analyzed so as to satisfy the high precision requirement of position detection in magnetic suspending flywheel system . The relationship between impedance and detected distance can be obtained based on the theory of eddy current by using the 2D model set up by utilizing the Ansys software. The measuring circuit＇ s output voltage peak value influenced by distance change can be obtained by emulate result. According to the parameters of coil model and element in the circuit, the reality sensor coil detecting loop can be made. The consistency of experimental result and emulating result indicates that the finite element method is valuable for design of eddy current sensor coil.

关 键 词：电涡流位移传感器 有限元法 阻抗 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]