低温等离子体放电管中的电子能量的测估  

Evaluation of Electron Energy in Low-Temperature Plasma Discharge Reactor

作　　者：马宁生[1] 葛自良[1] 

机构地区：[1]同济大学物理系,上海200092

出　　处：《同济大学学报（自然科学版）》2007年第10期1416-1419,共4页Journal of Tongji University:Natural Science

基　　金：同济大学理科科技发展基金资助项目

摘　　要：通过检测放电光谱的相对强度,根据检测到的原子、离子的跃迁谱线,考察放电等离子体形成的途径,从而估算电子能量;或检测同一种元素的激发态原子与激发态离子的发射谱线的相对强度,在近似满足局部热平衡条件下,推广使用高温等离子体的电子温度诊断公式,来估算电子温度.通过上述两种方法,可了解电子的能量情况,对放电管可作出相应的评价,进而对放电管进行优化研究.Electron energy is evaluated on the basis of the measurement of the relative intensity in the spectrum of discharges and the detection of the transition spectrum of atoms and ions as well as the investigation into the formation of the low-temperature plasma. Electron temperature in the condition of approximate heat balance on the partial area is also obtained by measuring relative intensity of multiplet from the exicited state atom and ion of the same element. The above two methods are helpful to the evaluation and optimization of the discharge reactor.

关 键 词：低温等离子体放电管 电子能量 发光光谱 

分 类 号：O536[理学—等离子体物理] TN13[理学—物理]