激光微细熔覆快速制造微加热器阵列  

Microheater Array Fabrication by Laser Micro-Cladding Method

作　　者：王少飞[1] 曹宇[1] 王小宝[1] 李祥友[1] 曾晓雁[1] 

机构地区：[1]华中科技大学武汉光电国家实验室(筹)激光部,湖北武汉430074

出　　处：《中国激光》2007年第11期1567-1570,共4页Chinese Journal of Lasers

基　　金：国家863计划(2005AA311030);国家自然科学基金(50575086)资助项目

摘　　要：采用激光微细熔覆法制备了2×2和1×4微加热器阵列,研究了激光扫描功率和速率对微加热器图形线宽的影响.结果表明,线宽随激光功率增大而增大;随扫描速率增大而减小.并对2×2微加热器阵列进行了性能测试.研究了加热时间、电压和空间位置对温度的影响规律.结果表明,微加热器温度随加热时间的延长而升高并最终达到稳定值;随电压的增加而升高;加热区域离微加热器越远,温度越低.对恒定电压下的升温速率进行了计算和测定,第一分钟内加热速度可达0.45℃/s.最后,给出了所制作的微加热器及其阵列的示例.The 2 × 2 and 1 × 4 microheater arrays have been fabricated by laser micro-cladding. The effect of laser power and scanning speed on the line width have been studied. The results demonstrate that the line width increases with the increase of laser power, and decreases with the increase of laser scanning speed. The performances of the 2 × 2 microheater array were tested. The effect of heating time, voltage and position on the temperature were studied. The results demonstrate that the temperature of the microheater increases with the increase of heating time and becomes unchangeable in the end. The temperature of the microheater increases with the increase of voltage. The temperature the heated area decreases with the increase of the distance to the microheater. And the calefactive speed was calculated when the voltage was stable, and it is up to 0.45 ℃/s. Lastly, some examples for microheaters array were demonstrated.

关 键 词：激光技术 激光微细熔覆 微加热器阵列 温度 

分 类 号：TN249[电子电信—物理电子学] TG665[金属学及工艺—金属切削加工及机床]