纳米光学金刚石薄膜的分析与改进(英文)  

Enhancement and Analysis of Optical Nano-diamond Film

作　　者：胡广[1] 王林军[1] 祝雪丰[1] 刘建民[1] 黄健[1] 徐金勇[1] 夏义本[1] 

机构地区：[1]上海大学材料科学与工程学院,上海200072

出　　处：《液晶与显示》2007年第5期548-552,共5页Chinese Journal of Liquid Crystals and Displays

基　　金：Supported by National Natural Science Foundation of China (No .60577040);Shanghai Foundation of Applied Ma-terials Research and Development ( No .0404); Nano-technology Project of Shanghai ( No .0452nm051 , No .0552nm046);Shanghai Leading Academic Disciplines (No .T0101)

摘　　要：由于极其优良的热学和光学性能,纳米金刚石薄膜极有可能应用于背投电视的激光光学窗口。文章通过在热丝辅助化学气相沉积法中采用偏压增强成核(BEN-HFCVD) ,成功地在(100)硅衬底上制得了适于作为光学窗口的高质量的光学级纳米金刚石薄膜,采用的偏压为-30 V。通过表征制备的纳米金刚石薄膜,发现它具有光滑的表面,表面均方根粗糙度(RMS)约为10 nm,并且对自支撑纳米金刚石薄膜进行透射光谱分析得到其透射率达到了50 %。Owing to its extremely excellent thermal and optical properties, nano-diamond film is expected to be used as the laser optical window in the projection television （PJTV）. In this work, high quality nano-crystalline diamond films for optical windows have been successfully prepared on （100） silicon substrates using bias enhanced nucleation hot filament chemical vapor deposition with 30 V negative bias voltage. It is found that the grown nano-diamond films have smooth surface with a root-mean-square surface roughness of - 10 nm, and the transmittance of free-standing nano-diamond film gets up to -50 %.

关 键 词：纳米金刚石 光学性质 表面粗糙度 偏压增强成核-热丝辅助化学气相沉积法 

分 类 号：O484[理学—固体物理]