数字全息显微测量技术的发展与最新应用  

Recent developments and applications of digital micro-holography

作　　者：周文静[1] 于瀛洁[1] 陈明仪[1] 

机构地区：[1]上海大学精密机械工程系应用光学与检测实验室

出　　处：《光学技术》2007年第6期870-874,共5页Optical Technique

基　　金：上海市重点学科建设资助项目(Y0102);中国科技部中-希国际合作资助项目

摘　　要：数字全息显微测量技术是检测显微样本微观结构的重要手段,具有系统简单、非入侵、动态性好等特点,是一种很好地具有应用前景的技术。综述了数字全息显微测量技术的发展,分析并比较了数字全息显微测量技术与其它显微测量技术的特点;归纳并分析了数字全息显微测量技术的典型光路系统及其特点;总结了数字全息显微测量技术的数值再现算法和误差抑制技术;列举了数字全息显微测量技术的最新应用。The digital miero-holography is a important means to measure mierostrueture of samples, and it is a technology with characteristics of simpleness, non-contact and dynamic, and so on. The development of the digital micro-holography is summarized. The characteristics of the digital micro-holography and others micro-measurement techniques are compared and an- alyzed. The representative optical systems and their specialty are concluded respectively. The numerical reconstruction algo- rithms and aberrationsuppression ways are summarized roundly. Some new applications of digital micro-holography are enumer- ated, and some prospect are presented.

关 键 词：光学测量 显微结构测量 数字全息显微技术 数值再现 误差抑制 

分 类 号：O438.1[机械工程—光学工程]