微尺度通道中可压缩气体三维流动的数值分析  

The Numerical Analysis of Three-Dimensional Compressible Gas Flow in Microtubes

作　　者：赵汉中[1] 陈瑶[1] 

机构地区：[1]华中科技大学力学系,武汉430074

出　　处：《微纳电子技术》2007年第11期1008-1011,1025,共5页Micronanoelectronic Technology

摘　　要：采用有限体积法计算了微尺度矩形通道中气体的三维流动,在计算中考虑了气体稀薄效应所造成的壁面相对滑移和气体的可压缩性。计算结果表明,由于壁面上存在着速度的相对滑移,壁面摩擦系数显著减小,质量流量明显加大。尽管微尺度通道中气流的马赫数通常都很小,但是气体的压缩性影响仍然不能忽略,质量流量随压力比的增大而非线性增长。The three-dimensional gas flow in rectangular microtubes by using the finite volume method was studied. The relative slip to the tube wall caused by gas rarefaction and the influences of gas compressibility were taken into account in the study. The numerical results indicate that the wall friction coefficient decreases and the mass flow rate increases due to the relative slip. Although Mach number in a microtube flow is normally very low, the gaseous compressibility effect may not be negligible and the variation of mass flow rate with the inlet-outlet pressure ratio exhibits significant nonlinear feature.

关 键 词：微尺度通道 滑移流动 有限体积法 

分 类 号：TH703[机械工程—仪器科学与技术] O354[机械工程—精密仪器及机械]