大位移测量的容栅传感器工作原理  

The Analysis on the Principle of the Capacitive Grate Transducer for Measuring of Large Displacement

作　　者：刘德全[1] 王筱华[1] 

机构地区：[1]大连轻工业学院机械工程系

出　　处：《大连轻工业学院学报》1997年第2期18-22,共5页Journal of Dalian Institute of Light Industry

摘　　要：从理论上分析了容栅传感器的工作原理及其理论非线性误差，提出了较为合理的等效电路和理论非线性误差表达式。容栅传感器是一种相位跟踪型位移传感器，对输入信号的幅值变化不敏感，具有较好的抗干扰能力。容栅传感器的原理非线性误差与小发射极板宽度成正比，为减小非线性误差，在工艺条件允许的情况下，应尽可能减小小发射极的宽度。In this paper, the principle of the capacitive grate transducer for large displacement is analyzed, and more reasonable equivalent circuit and formula of theoretic nonlinear error are presented. As a phase-modulated displacement transducer, it is insensitive to the amplitude changing of the input voltage signal, thus it possesses better capacibility for anti-disturbance. Its theoretical nonlinear error is directly proportional to the width of the small emitter. In order to reduce this error, the width of the small emitter should be reduced to the highest possible allowed by manufacturing technique.

关 键 词：容栅 传感器 位移测量 误差 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]