A Contact and Non-Contact Hybrid Profilometer with Large Range  

作　　者：YUN Jianping YANG Xudong XIE Tiebang CHANG Suping 

机构地区：[1]School of Electronic Information, Wuhan University, Wuhan 430072, Hubei, China [2]School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China

出　　处：《Wuhan University Journal of Natural Sciences》2007年第6期1066-1072,共7页武汉大学学报（自然科学英文版）

基　　金：Supported by the National Natural Science Foundation of China (50605018)

摘　　要：A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn.A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn.

关 键 词：surface topography contact/non-contact measurement interference microscope 

分 类 号：TH741.3[机械工程—光学工程] TH744.31[机械工程—仪器科学与技术]