长距离同轴度测量方法及实验  

Long Distance Coaxality Measurement System and Experiments

作　　者：成相印[1] 方仲彦[1] 殷纯永[1] 郭继华[1] 

机构地区：[1]清华大学

出　　处：《计量学报》1997年第2期85-89,共5页Acta Metrologica Sinica

基　　金：国家自然科学基金

摘　　要：本文介绍了一种新型的自适应双频激光同轴度测量系统，该系统利用两个完全对称的渥拉斯顿棱镜，一个作为测量元件，另一个作为补偿元件。采用比相技术处理测量信号，因而测量元件可以暂时移出光路，能够进行同轴度的测量。系统的光学设计使激光光束的平漂和角漂不影响测量结果，对激光的漂移有自适应性。两束干涉光基本符合共光路原则，因而对大气湍流、空气扰动的影响具有更强的适应性，可用于长距离直线度、同轴度的测量。该系统与ＨＰ５５２８双频激光干涉仪在２７ｍ的长导轨上进行了测量直线度的比对实验及挡光实验。比对实验结果表明，该系统在测量精度及稳定性上不低于ＨＰ５５２８。挡光实验表明，该系统挡光后，数据能够自动恢复，可用于同轴度的测量。A new dual frequency laser coaxality measurement system is presented. This system has two Wollaston prisms W 1 and W 2 of same structure,one for measurement;and the other for compensation.When the dual frequency laser beam enters W 1,it is splitted into two beams with a slight angle. After W 2 the two beams become parallel to each other. They are reflected by a rectangular reflector,then pass through W 2 and W 1 and become the measurement signal. Using phasometer,the phase change between measurement signal and reference signal can be detected and it is proportional to the lateral movement of Wollaston prisms. W 1 or W 2 can be moved out off the beam,therefore the system can be used to measure coaxality. The displacement drift and angle drift of laser beam are compensated by the adaptive optical system automatically. Comparison experiment between the system and HP5528 has been done. Experimental results have shown that the system has high stability and accuracy and can be used in long distance alignment and coaxality measurement.

关 键 词：直线度测量 同轴度测量 自适应 双频激干涉仪 

分 类 号：TG839[金属学及工艺—公差测量技术] TH744.3[机械工程—光学工程]