基于有限元法的片式电阻阻值与激光刻蚀路径关系的研究  

The Influence Investigation of Laser Trimming Path on the Resistance of Chip Resistors based on the Finite Element

作　　者：王志娟[1] 郑玉彤[1] 汤建华[2] 

机构地区：[1]中央民族大学信息工程学院,北京100081 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《中央民族大学学报（自然科学版）》2007年第4期318-324,共7页Journal of Minzu University of China(Natural Sciences Edition)

基　　金：中央民族大学2005年度青年教师科研基金项目(CUN29A)

摘　　要：激光对片式电阻的刻蚀路径直接影响片式电阻的阻值精度,掌握激光刻蚀路径对片阻阻值的影响可为精调片阻阻值提供理论依据.掌握激光刻蚀路径与片阻阻值关系的前提是确定准确、有效的研究方法,首先,应确定片阻阻值与激光刻蚀路径关系的物理模型,然后应用有限元法计算该物理模型的数值解,分析、处理这些数据可得到不同型号片阻阻值与不同刻蚀路径之间的定量关系;经实验验证表明,利用有限元法得到的片阻阻值与刻蚀路径的关系函数的计算偏差不大于2%,可以应用有限元法研究激光刻蚀路径对片阻阻值的影响,进而为精调片阻阻值提供了控制依据.The laser trimming path affects the precision of chip resistors. Their relationship can provide the control basis for improving the trimming precision. The precondition of mastering their relationship is applying the exact and efficient method. First, the physical model of chip resistor is provided. Then the finite element method is used to solve the physical model. Finally, the dependence of resistance on laser trimming path is gotten and quantitative formula is fitted. The experimental data validated that the calculating error of fitted formula is less than 2 %. Applying the finite element method can study the relationship of resistance and laser trimming path. And the relationship can provide control basis for laser trimming process.

关 键 词：激光调阻 调阻精度 激光刻蚀路径 有限元 

分 类 号：TN2[电子电信—物理电子学]