钛合金表面电弧离子镀TiAlN涂层的组织与性能  

Microstructure and Properties of the TiAlN Coating on Ti Alloy by Arc Ion Plating

作　　者：王宝云[1] 严鹏[1] 李争显[1] 杜继红[1] 潘晓龙[1] 

机构地区：[1]西北有色金属研究院,陕西西安710016

出　　处：《表面技术》2007年第6期33-35,共3页Surface Technology

摘　　要：运用电弧离子镀技术,采用独立Ti、Al靶材,在TC4钛合金表面制备了厚度为6.5μm的TiAlN涂层,利用SEM、EDS对涂层微观组织进行了分析,并测试了涂层的力学性能和摩擦学性能。结果表明:涂层表面存在粒子撞击时产生的凹坑和液滴碰撞表面而铺平、凝固形成的层片状组织,镀膜后,试样表面粗糙度升高。涂层表面Ti、Al原子比为0.93∶1,表面显微硬度达到23000MPa。试样的磨损试验说明:脱落的涂层微粒对涂层产生划伤,是涂层破坏的主要形式;涂层抗磨损能力提高了13倍。TiAlN coating was deposited on TC4 substrate by multiplicity arc plating using independent Al and Ti target. SEM and EDS show the microstructure of the coating and the mechanical and tribological properties were tested： the roughness of the sample enhance after plating, the pit and lamella organization existenced on the coating surface because of the granule hit and bubble collision which forms. The depth of the coating is 6.5 μm and the microhardness is HV0.025 23000. Elements Ti and Al assume the trapezoid distribution in coating and atom ratio is 0.93： 1. The wear tests show that, the Ti alloy coating anti-attrition ability enhances 13 times. The falls of coating particle is the main form of the coating destroys, it produces to the coating scratches.

关 键 词：钛 电弧离子镀 TIALN涂层 磨损性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG174.45[金属学及工艺—金属学]