范德华力对硅基微悬臂梁抗粘附稳定性的影响  

ADHESION STABILITY OF SILICON MICROCANTILEVERS UNDER VAN DER WAALS FORCES

作　　者：张建[1] 丁建宁[1] 王权[1] 张华中[1] 

机构地区：[1]江苏大学微纳米科学技术中心,江苏镇江212013

出　　处：《机械强度》2007年第6期923-926,共4页Journal of Mechanical Strength

基　　金：国家自然科学基金项目资助(50475124);新世纪优秀人才资助计划项目(NCT-04-0515);教育部优秀青年教师资助计划(2003335)~~

摘　　要：通过在硅微悬臂梁与基底表面上涂覆低表面能的憎水性OTS(CH3(CH2)17SiCl3)膜,以除去接触面间的表面张力;把梁与基底均接地,以除去接触面间的静电力,研究仅有范德华力作用时,硅微悬臂梁结构的抗粘附稳定性。根据两接触面均为粗糙表面的微观实际接触模型,在接触表面产生塑性变形的情况下,计算范德华粘附能大小,并分析表面形貌对其影响,得到粗糙表面接触的微梁抗粘附临界长度。The adhesion of silicon microcantilever is studied under van der Waals forces when other surface forces are eliminated by some techniques. The surfaces of the cantilever and the substrate are coated with low-surface-energy hydrophobic OTS（ CH3 （CH2）17 SiCl3 ） molecular films to remove capillary forces. The cantilever and the substrate are electrically grounded to eliminate electrostatic force between them. Considering the actual contact model of two rough surfaces and their influence on the adhesion, as well as the plastic deformation in the contact, the adhesion energy of the model under van der Waals forces is calculated. Additionally, the effects of surface roughness on the adhesion energy of van der Waals forces are analyzed. At last, the pull-in length of the cantilever of rough surface is calculated.

关 键 词：微纳器件 范德华力 粘附 稳定性 

分 类 号：TH117.1[机械工程—机械设计及理论] O343.3[理学—固体力学]