LTCCs用低温烧结(Zn，Mg)TiO_3介电陶瓷  

Low-Temperature Sintered(Zn,Mg)TiO_3 Dielectric Ceramics for LTCCs

作　　者：刘向春[1] 高峰[1] 许冰[1] 赵鸣[1] 田长生[1] 

机构地区：[1]西北工业大学材料学院,陕西西安710072

出　　处：《稀有金属材料与工程》2007年第A03期121-125,共5页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(60501015);西北工业大学博士论文创新基金(CX200408)

摘　　要：通过化学法结合固相烧结技术制备了(Zn,Mg)TiO_3(简称ZMT)陶瓷,掺杂V_2O_5降低陶瓷的烧结温度,研究了V_2O_5掺杂ZMT陶瓷的低温烧结行为、相转变以及介电性能。结果表明:化学法结合V_2O_5掺杂有效地将钛酸锌陶瓷烧结温度从1200～1300℃降至900℃以下;Mg的加入增强了六方相的热稳定性,扩展了六方相的稳定区间。V_2O_5掺杂ZMT陶瓷具有良好的介电性能,875℃烧结的ZMT陶瓷介电常数ε_r=22,介电损耗tanδ=5.7×10^(-4),是制备LTCCs(低温共烧陶瓷电容器)的优秀候选材料,具有很好的应用前景。（Zn, Mg）TiO3 （abbreviated as ZMT） were prepared by conventional mixed-oxide method combined with a chemical processing. V205 was added to lower the sintering temperature of ZMT. The low-temperature sintering behavior, phase structures and dielectric properties of ZMT ceramics were investigated. The results show that the densification temperature of ZMT ceramics can be reduced from 1200-1300 ℃ to below 900 ℃ by the chemical processing combined V2O5 additions. Mg enhances the thermal stability and extends the stable range of hexagonal phase. V2O5-doped ZMT ceramics exhibit good dielectric properties, εr=22 and tanδ=5.7× 10^-4 for ZMT ceramics sintered at 875℃, which can be provided as suitable candidates for LTCCs and have a promising practicality prosperity.

关 键 词：钛酸锌镁 低温烧结 热稳定性 相结构 

分 类 号：TN604[电子电信—电路与系统]