浅H_3PO_4液层下YBCO高温超导薄膜表面粗糙度的红外实时表征  

Real Time Characterization of Surface Roughness of YBCO HTS Film under Thin H_3PO_4 Layer

作　　者：刘娟秀[1] 罗正祥[1] 羊恺[1] 刘霖[1] 补世荣[1] 张天良[1] 叶玉堂[1] 

机构地区：[1]电子科技大学,四川成都610054

出　　处：《稀有金属材料与工程》2007年第11期1951-1954,共4页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(60277008);国家863基金(2002AA306421);电子科大校青年基金项目(JX05010)

摘　　要：提出利用红外热像实时监测系统,实时获得在YBCO高温超导薄膜上H3PO4腐蚀浅液层的红外灰度数值分布,并以浅液层热交换简化模型为基础,通过归一化红外灰度标准差值表征YBCO高温超导薄膜表面粗糙度的变化。理论分析与实验结果均表明,由归一化红外灰度标准差值的变化曲线,可以清楚展现YBCO高温超导薄膜表面粗糙度增大、减小以及趋于平缓的3个阶段,并能直接获得每个阶段所对应的时间。在本实验条件下,表面粗糙度在8s时达到最大值,然后逐渐下降,到40s时开始趋于稳定。浅液层条件下的YBCO高温超导薄膜表面粗糙度的成功观测,是一个重要的阶段目标,为最终解决YBCO高温超导薄膜湿法刻蚀中粗糙度的实时监测难题奠定了良好基础。A real time monitoring system based on infrared technique has been designed to get the infrared grey-scale distribution of thin etchant layer over YBCO HTS （high temperature superconductor） film and to characterize the variation of YBCO surface roughness using normalized grey-scale standard deviation based on the thermal exchange model of liquid film. Theoretical analysis and experimental results show that the three stages of YBCO surface roughness, i.e., increasing, decreasing and going smooth, can be clearly described, as well as the corresponding time of every stage can be directly obtained from the normalized curve of grey-scale standard deviation. In the conditions mentioned in this study, the maximal value of surface roughness appears at 8 s, then gradually falls, and turns to be stable from 40 s. It is an important stage＇s aim to observe the YBCO surface roughness under thin etchant layer successfully, and to establish a favorable basis for the difficult real time monitoring of wet etching process ofYBCO HTS film.

关 键 词：超导薄膜 红外热像 粗糙度 钇钡铜氧 

分 类 号：TB383.2[一般工业技术—材料科学与工程]